THIN-FILM VACUUM EQUIPMENT

被引：0

作者：

HOFFMAN, V ^{[1
]}

机构：

[1] VARIAN ASSOC,VACUUM DIV,PALO ALTO,CA 94303

来源：

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：93 / 99

页数：7

共 50 条

[1] DRYING IN THIN-FILM EQUIPMENT
不详
PROCESS TECHNOLOGY, 1973, 18 (4-5): : 191 - 191
[2] Vacuum/thin-film research
不详
R&D MAGAZINE, 2000, 42 (02): : 57 - 57
[3] CHEMICAL REACTIONS IN THIN-FILM EQUIPMENT
MUTZENBE.AB
GIGER, A
TRANSACTIONS OF THE INSTITUTION OF CHEMICAL ENGINEERS AND THE CHEMICAL ENGINEER, 1968, 46 (06): : T189 - &
[4] SELECTING THIN-FILM DEPOSITION EQUIPMENT
GRAPER, EB
RESEARCH-DEVELOPMENT, 1975, 26 (02): : 49 - &
[5] Thin-film deposition relies on vacuum
Spencer, Rick
PHYSICS WORLD, 2008, 21 (02) : A7 - A7
[6] EVAPORATOR FOR THIN-FILM SYNTHESIS IN VACUUM
MURAVEVA, KK
VORONTSOV, MD
RUBETS, VP
INSTRUMENTS AND EXPERIMENTAL TECHNIQUES, 1988, 31 (05) : 1337 - 1340
[7] A DISTRIBUTING DEVICE FOR THIN-FILM EVAPORATION EQUIPMENT
KHARISOV, MA
KOGAN, VB
INTERNATIONAL CHEMICAL ENGINEERING, 1967, 7 (02): : 189 - &
[8] Coating equipment - Advances thin-film applications
Sander, M
PHOTONICS SPECTRA, 2004, 38 (01) : 128 - +
[9] MINIATURIZED THIN-FILM THERMAL VACUUM SENSOR
ALVESTEFFER, WJ
JACOBS, DC
BAKER, DH
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1995, 13 (06): : 2980 - 2985
[10] A SURVEY OF THIN-FILM VACUUM DEPOSITION TECHNIQUES
RUSSELL, H
SMITH, J
CERAMIC AGE, 1967, 83 (08): : 36 - &