H- BEAM EMITTANCE MEASUREMENTS FOR THE PENNING AND THE ASYMMETRIC, GROOVED MAGNETRON SURFACE-PLASMA SOURCES

被引：6

作者：

SMITH, HV

ALLISON, P

机构：

来源：

关键词：

D O I：

10.1063/1.1137006

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：405 / 408

页数：4

共 21 条

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