INFRARED REFLECTANCE SPECTROSCOPY OF VERY THIN-FILMS OF A-SIH

被引：22

作者：

MALEY, N ^{[1
]}

SZAFRANEK, I ^{[1
]}

MANDRELL, L ^{[1
]}

KATIYAR, M ^{[1
]}

ABELSON, JR ^{[1
]}

THORNTON, JA ^{[1
]}

机构：

[1] UNIV ILLINOIS,COORDINATED SCI LAB,URBANA,IL 61801

来源：

JOURNAL OF NON-CRYSTALLINE SOLIDS | 1989年 / 114卷

关键词：

D O I：

10.1016/0022-3093(89)90100-2

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：163 / 165

页数：3

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[4] INFRARED ELLIPSOMETRY STUDY OF THE VIBRATIONAL PROPERTIES AND THE GROWTH OF HYDROGENATED AMORPHOUS-SILICON ULTRATHIN FILMS [J].

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[7]

MALEY N, IN PRESS

[8] HYDROGENATED AMORPHOUS-SILICON FILMS DEPOSITED BY REACTIVE SPUTTERING - THE ELECTRONIC-PROPERTIES, HYDROGEN-BONDING AND MICROSTRUCTURE [J].

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