DIRECT MEASUREMENT OF EVAPORATION DURING RAPID THERMAL-PROCESSING OF CAPPED GAAS

被引：31
|
作者：
HAYNES, TE [1 ]
CHU, WK [1 ]
PICRAUX, ST [1 ]
机构：
[1] SANDIA NATL LABS,ALBUQUERQUE,NM 87185
来源：
APPLIED PHYSICS LETTERS | 1987年 / 50卷 / 16期
关键词：
D O I：
10.1063/1.97973
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：1071 / 1073
页数：3
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