DIRECT MEASUREMENT OF EVAPORATION DURING RAPID THERMAL-PROCESSING OF CAPPED GAAS

被引：31

作者：

HAYNES, TE ^{[1
]}

CHU, WK ^{[1
]}

PICRAUX, ST ^{[1
]}

机构：

[1] SANDIA NATL LABS,ALBUQUERQUE,NM 87185

来源：

APPLIED PHYSICS LETTERS | 1987年 / 50卷 / 16期

关键词：

D O I：

10.1063/1.97973

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1071 / 1073

页数：3

共 50 条

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