ANOMALOUS BORON-DIFFUSION IN SILICON FROM PLANAR BORON-NITRIDE SOURCES

被引：0

作者：

BROWN, DM ^{[1
]}

机构：

[1] GE CORP,SCHENECTADY,NY 12301

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1974年 / 121卷 / 12期

关键词：

D O I：

10.1149/1.2401776

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

收藏

页码：1677 / 1677

页数：1

相关论文

共 11 条

[1] CHARACTERISTICS OF DOPED OXIDES AND THEIR USE IN SILICON DEVICE FABRICATION
BROWN, DM
GHEZZO, M
GARFINKEL, M
TENNEY, A
TAFT, EA
WONG, J
[J]. JOURNAL OF CRYSTAL GROWTH, 1972, 17 (DEC) : 276 - +
[2] GLASS SOURCE B DIFFUSION IN SI AND SIO2
BROWN, DM
KENNICOTT, PR
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1971, 118 (02) : 293 - +
[3] CORDES LF, UNPUBLISHED DATA
[4] EFFECT OF LOW PRESSURE ON SURFACE CHARGE OF ELECTRETS
DRAUGHN, RA
CATLIN, A
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1968, 115 (04) : 391 - &
[5] Experiments on electrets
Gross, B
[J]. PHYSICAL REVIEW, 1944, 66 (1/2): : 26 - 28
[6] STATIC CHARGES ON DIELECTRICS
GROSS, B
[J]. BRITISH JOURNAL OF APPLIED PHYSICS, 1950, 1 (OCT): : 259 - 267
[7] GROSS B, 1969, J ELECTROCHEM SOC, V116, P824
[8] GROSS B, 1949, J CHEM PHYS, V17, P886
[9] PRODUCTION AND CHARGE DECAY OF FLIM ELECTRETS
PERLMAN, MM
REEDYK, CW
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1968, 115 (01) : 45 - &
[10] ELECTRETS, SEMIPERMANENTLY CHARGED CAPACITORS
ROOS, J
[J]. JOURNAL OF APPLIED PHYSICS, 1969, 40 (08) : 3135 - &