MICROMACHINED SILICON CANTILEVERS AND TIPS FOR BIDIRECTIONAL FORCE MICROSCOPY

被引：10

作者：

BUSER, RA

BRUGGER, J

DEROOIJ, NF

机构：

[1] Institute of Microtechnology, University of Neuchâtel, CH-2000 Neuchâtel

来源：

ULTRAMICROSCOPY | 1992年 / 42卷

关键词：

D O I：

10.1016/0304-3991(92)90469-Z

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

A monocrystalline silicon lever with an integrated silicon tip for a force/friction microscope was realized. Theoretical studies have been carried out to find the shape and dimensioning according to the mechanical system requirements. Moreover, sharp tips with a high aspect ratio could be demonstrated.

引用

页码：1476 / 1480

页数：5

共 19 条

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