ACTIVATION OF BORON-DOPANT ATOMS IN ION-IMPLANTED DIAMONDS

被引:145
|
作者
PRINS, JF
机构
来源
PHYSICAL REVIEW B | 1988年 / 38卷 / 08期
关键词
D O I
10.1103/PhysRevB.38.5576
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
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页码:5576 / 5584
页数:9
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