POINT COLLECTOR IONIZATION GAUGE WITH SPHERICAL GRID FOR MEASURING PRESSURES BELOW 10-11 PA

被引：19

作者：

WATANABE, F

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1987年 / 5卷 / 02期

关键词：

D O I：

10.1116/1.574112

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

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页码：242 / 248

页数：7

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