DEPOSITION OF CONDUCTING AND TRANSPARENT THIN-FILMS OF INDIUM TIN OXIDE BY REACTIVE ION PLATING

被引：33
|
作者：
MACHET, J
GUILLE, J
SAULNIER, P
ROBERT, S
机构：
来源：
THIN SOLID FILMS | 1981年 / 80卷 / 1-3期
关键词：
D O I：
10.1016/0040-6090(81)90217-0
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：149 / 155
页数：7
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