DEPOSITION OF CONDUCTING AND TRANSPARENT THIN-FILMS OF INDIUM TIN OXIDE BY REACTIVE ION PLATING

被引：33

作者：

MACHET, J

GUILLE, J

SAULNIER, P

ROBERT, S

机构：

来源：

THIN SOLID FILMS | 1981年 / 80卷 / 1-3期

关键词：

D O I：

10.1016/0040-6090(81)90217-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

收藏

页码：149 / 155

页数：7

相关论文

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[3] PROPERTIES OF TRANSPARENT CONDUCTING FILMS OF SNO2-SB AND IN2O3-SN DEPOSITED BY HYDROLYSIS
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