GAS-PHASE ETCHING OF SAPPHIRE .3. CHLOROTRIFLUOROMETHANE

被引：2

作者：

MANASEVIT, HM ^{[1
]}

机构：

[1] ROCKWELL INT ELECTR GRP, ELECTR RES DIV, ANAHEIM, CA 92803 USA

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1974年 / 121卷 / 02期

关键词：

D O I：

10.1149/1.2401799

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

收藏

页码：293 / 297

页数：5

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