INFLUENCE OF REACTIVE GASES ON SPUTTERING AND SECONDARY ION EMISSION - OXIDATION OF TITANIUM AND VANADIUM DURING ENERGETIC PARTICLE IRRADIATION

被引：50
作者：
HOFER, WO
MARTIN, PJ
机构：
来源：
APPLIED PHYSICS | 1978年 / 16卷 / 03期
关键词：
D O I：
10.1007/BF00885122
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：271 / 278
页数：8
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共 27 条
[1]  
BENNINGHOVEN A, 1965, Z ANGEW PHYSIK, V27, P51
[2]   COMPARISON OF PROPERTIES OF DIFFERENT MATERIALS USED AS MASKS FOR ION-BEAM ETCHING [J].
CANTAGREL, M .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (06) :1340-1343
[3]   PHOTOEMISSION ENERGY-LEVEL MEASUREMENTS OF SORBED GASES ON TITANIUM [J].
EASTMAN, DE .
SOLID STATE COMMUNICATIONS, 1972, 10 (10) :933-&
[4]   PREPARATION OF SUBOXIDES IN TI-O SYSTEM BY REACTIVE SPUTTERING [J].
GERAGHTY, KG ;
DONAGHEY, LF .
THIN SOLID FILMS, 1977, 40 (JAN) :375-383
[5]   ELECTRONIC APERTURE FOR IN-DEPTH ANALYSIS OF SOLIDS WITH AN ION MICROPROBE [J].
HOFER, WO ;
LIEBL, H ;
ROOS, G ;
STAUDENMAIER, G .
INTERNATIONAL JOURNAL OF MASS SPECTROMETRY AND ION PROCESSES, 1976, 19 (03) :327-334
[6]   DEPTH-PROFILING OF CU-NI SANDWICH SAMPLES BY SECONDARY ION MASS-SPECTROMETRY [J].
HOFER, WO ;
LIEBL, H .
APPLIED PHYSICS, 1975, 8 (04) :359-360
[7]  
HOFER WO, J NUCLEAR MAT
[8]  
HOFER WO, 1975, FAL EL SOC M DALL, P243
[9]  
HOFER WO, ION BEAM SURFACE LAY, V2, P659
[10]  
HOFFMAN S, 1977, THIN SOLID FILMS, V43, P275
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