A Planar One-Port Microwave Microfluidic Sensor for Microliter Liquids Characterization

被引：51

作者：

Bao, Xiue ^{[1
]}

Ocket, Ilja ^{[1
,2
]}

Crupi, Giovanni ^{[3
]}

Schreurs, Dominique ^{[1
]}

Bao, Juncheng ^{[1
]}

Kil, Dries ^{[1
]}

Puers, Bob ^{[1
]}

Nauwelaers, Bart ^{[1
]}

机构：

[1] Katholieke Univ KU Leuven, Div ESAT TELEMIC, B-3001 Leuven, Belgium

[2] Interuniv Microelect Ctr IMEC, B-3001 Leuven, Belgium

[3] Univ Messina, Dept Biomed & Dent Sci & Morphofunct Imaging, I-98125 Messina, Italy

来源：

IEEE JOURNAL OF ELECTROMAGNETICS RF AND MICROWAVES IN MEDICINE AND BIOLOGY | 2018年 / 2卷 / 01期

关键词：

Interdigital capacitor (IDC); microfluidics; microwave spectroscopy; permittivity measurements;

D O I：

10.1109/JERM.2018.2807984

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper describes the design, fabrication, and assessment of an on-wafer measurement platform for noninvasive quantitative characterization of small volumes of liquids over the frequency range from 500 kHz to 1 GHz. The platform, integrated with amicrometer scale SU-8 microfluidic channel, allows accurate placement of very small liquid volumes at a well-defined location. For the first time, a miniaturized one-port interdigital capacitor (IDC) sensor is used for dielectric spectroscopy measurements at RF/lower microwave frequency range. Three-dimensional simulation on the IDC sensor with the finite element method (FEM) verifies the complex permittivity extraction model. A validation of this platform is performed using water-isopropanol mixtures, and then, it is utilized for liquid temperature measurement and baker's yeast cell concentration detection. An observation over 5 min is also carried out on a cell suspension, which has shown the capability of this platform in monitoring dynamic process in chemical or biological fields.

引用

页码：10 / 17

页数：8

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