ALUMINUM-ALLOY METALLIZATION FOR INTEGRATED-CIRCUITS

被引：8
作者：
GHATE, PB
机构：
来源：
THIN SOLID FILMS | 1981年 / 83卷 / 02期
关键词：
D O I：
10.1016/0040-6090(81)90666-0
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：195 / 205
页数：11
相关论文
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