DIELECTRIC MATERIALS IN SEMICONDUCTOR DEVICES

被引：24
作者：
CHU, TL
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1969年 / 6卷 / 01期
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D O I：
10.1116/1.1492617
中图分类号：
O59 [应用物理学];
学科分类号：
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页码：25 / +
页数：1
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