DISTRIBUTIONS OF GROWTH-RATES ON PATTERNED SURFACES MEASURED BY SCANNING MICROPROBE REFLECTION HIGH-ENERGY ELECTRON-DIFFRACTION

被引：150

作者：

HATA, M

ISU, T

WATANABE, A

KATAYAMA, Y

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1990年 / 8卷 / 04期

关键词：

D O I：

10.1116/1.584997

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：692 / 696

页数：5

共 9 条

[1] REAL-TIME OBSERVATION OF GAAS (001) SURFACES DURING MOLECULAR-BEAM EPITAXY BY SCANNING MICROPROBE REFLECTION HIGH-ENERGY ELECTRON-DIFFRACTION [J].

ISU, T ;

WATANABE, A ;

HATA, M ;

KATAYAMA, Y .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1988, 27 (12) :L2259-L2261

[2] ANISOTROPIC LATERAL GROWTH OF GAAS BY MOLECULAR-BEAM EPITAXY [J].

KAWABE, M ;

SUGAYA, T .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1989, 28 (07) :L1077-L1079

[3] REFLECTION HIGH-ENERGY ELECTRON-DIFFRACTION OSCILLATIONS FROM VICINAL SURFACES - A NEW APPROACH TO SURFACE-DIFFUSION MEASUREMENTS [J].

NEAVE, JH ;

DOBSON, PJ ;

JOYCE, BA ;

ZHANG, J .

APPLIED PHYSICS LETTERS, 1985, 47 (02) :100-102

[4] DYNAMICS OF FILM GROWTH OF GAAS BY MBE FROM RHEED OBSERVATIONS [J].

NEAVE, JH ;

JOYCE, BA ;

DOBSON, PJ ;

NORTON, N .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1983, 31 (01) :1-8

[5]

NILSSON S, 1989, APPL PHYS LETT, V55, P92

[6] ANISOTROPIC SURFACE MIGRATION OF GA ATOMS ON GAAS(001) [J].

OHTA, K ;

KOJIMA, T ;

NAKAGAWA, T .

JOURNAL OF CRYSTAL GROWTH, 1989, 95 (1-4) :71-74

[7] GROWTH OF GAAS-GA1-XALXAS OVER PREFERENTIALLY ETCHED CHANNELS BY MOLECULAR-BEAM EPITAXY - TECHNIQUE FOR 2-DIMENSIONAL THIN-FILM DEFINITION [J].

TSANG, WT ;

CHO, AY .

APPLIED PHYSICS LETTERS, 1977, 30 (06) :293-296

[8] SPONTANEOUS GROWTH OF COHERENT TILTED SUPERLATTICE ON VICINAL (100) GAAS SUBSTRATES [J].

TSUCHIYA, M ;

PETROFF, PM ;

COLDREN, LA .

APPLIED PHYSICS LETTERS, 1989, 54 (17) :1690-1692

[9] REFLECTION HIGH-ENERGY ELECTRON-DIFFRACTION MEASUREMENT OF SURFACE-DIFFUSION DURING THE GROWTH OF GALLIUM-ARSENIDE BY MBE [J].

VANHOVE, JM ;

COHEN, PI .

JOURNAL OF CRYSTAL GROWTH, 1987, 81 (1-4) :13-18

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