OPTICAL-ABSORPTION AND HYDROGEN CONTENT OF PLASMA-DEPOSITED CARBON-FILMS

被引:15
作者
ELHOSSARY, FM
FABIAN, DJ
SOFIELD, CJ
机构
[1] UNIV STRATHCLYDE,DEPT PHYS & APPL PHYS,GLASGOW G1 1XN,SCOTLAND
[2] AERE,HARWELL OX11 0RA,OXON,ENGLAND
关键词
D O I
10.1016/0040-6090(88)90342-2
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:29 / 34
页数:6
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