OPTICAL-ABSORPTION AND HYDROGEN CONTENT OF PLASMA-DEPOSITED CARBON-FILMS

被引：15
|
作者：
ELHOSSARY, FM
FABIAN, DJ
SOFIELD, CJ
机构：
[1] UNIV STRATHCLYDE,DEPT PHYS & APPL PHYS,GLASGOW G1 1XN,SCOTLAND
[2] AERE,HARWELL OX11 0RA,OXON,ENGLAND
来源：
THIN SOLID FILMS | 1988年 / 157卷 / 01期
关键词：
D O I：
10.1016/0040-6090(88)90342-2
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：29 / 34
页数：6
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