DEPENDENCE OF F-ATOM DENSITY ON PRESSURE AND FLOW-RATE IN CF4 GLOW-DISCHARGES AS DETERMINED BY EMISSION-SPECTROSCOPY

被引：81
作者：
COBURN, JW
CHEN, M
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1981年 / 18卷 / 02期
关键词：
D O I：
10.1116/1.570781
中图分类号：
O59 [应用物理学];
学科分类号：
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页码：353 / 356
页数：4
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