NB3AL THIN-FILM SYNTHESIS BY ELECTRON-BEAM COEVAPORATION

被引:36
作者
KWO, J [1 ]
HAMMOND, RH [1 ]
GEBALLE, TH [1 ]
机构
[1] STANFORD UNIV,WW HANSEN LABS PHYS,STANFORD,CA 94305
关键词
D O I
10.1063/1.327783
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:1726 / 1732
页数:7
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