SENSITIVE RESIST SYSTEMS BASED ON ACID-CATALYZED POLYMER REACTIONS

被引：8

作者：

ITO, H

ENGLAND, WP

UEDA, M

机构：

[1] Ibm Research Division, Almaden Research Center, San Jose, California, 95120

来源：

MAKROMOLEKULARE CHEMIE-MACROMOLECULAR SYMPOSIA | 1992年 / 53卷

关键词：

D O I：

10.1002/masy.19920530114

中图分类号：

O63 [高分子化学（高聚物）];

学科分类号：

070305 ; 080501 ; 081704 ;

摘要：

Acid-catalyzed polymer reactions have been successfully utilized in the design of chemical amplification resist systems for semiconductor manufacturing. In this paper are described preparation and acid-catalyzed depolymerization reactions of alpha-substituted polystyrenes.

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收藏

页码：139 / 149

页数：11

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