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- [2] PHOTOCHEMICAL VAPOR-DEPOSITION OF SILICON-NITRIDE FILMS JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (03): : 363 - 368
- [3] PHOTOCHEMICAL VAPOR-DEPOSITION OF ALUMINUM THIN-FILMS LASER- AND PARTICLE-BEAM CHEMICAL PROCESSES ON SURFACES, 1989, 129 : 73 - 77
- [8] PHOTOCHEMICAL VAPOR-DEPOSITION OF HYDROGENATED AMORPHOUS-SILICON FILMS APPLIED PHYSICS B-PHOTOPHYSICS AND LASER CHEMISTRY, 1986, 41 (02): : 103 - 108