AXIAL DISTRIBUTION OF OPTICAL-EMISSION IN A PLANAR MAGNETRON DISCHARGE

被引：70

作者：

GU, L ^{[1
]}

LIEBERMAN, MA ^{[1
]}

机构：

[1] UNIV CALIF BERKELEY,ELECTR RES LAB,BERKELEY,CA 94720

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1988年 / 6卷 / 05期

关键词：

D O I：

10.1116/1.575460

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：2960 / 2964

页数：5

共 7 条

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YAGURA, S ;

UENO, H ;

NAGANO, M .

[2]

ROSSANGL SM, 1986, J VAC SCI TECHNOL A, V4, P1882

[3] INDUCED DRIFT CURRENTS IN CIRCULAR PLANAR MAGNETRONS [J].

ROSSNAGEL, SM ;

KAUFMAN, HR .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (01) :88-91

THORNTON, JA .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1978, 15 (02) :171-177

[5]

THORNTON JA, 1978, THIN FILM PROCESSES, P76

[6]

Waits R.K., 1978, THIN FILM PROCESSES, p[24, 131]

[7] RADIAL CURRENT DISTRIBUTION AT A PLANAR MAGNETRON CATHODE [J].

WENDT, AE ;

LIEBERMAN, MA ;

MEUTH, H .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1988, 6 (03) :1827-1831