EFFECTS OF ENHANCED DIFFUSION ON PREFERRED SPUTTERING OF HOMOGENEOUS ALLOY SURFACES

被引：150
作者：
HO, PS
机构：
来源：
SURFACE SCIENCE | 1978年 / 72卷 / 02期
关键词：
D O I：
10.1016/0039-6028(78)90294-7
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
引用
收藏
页码：253 / 263
页数：11
相关论文
共 16 条
[1]  
BALAKIR EA, 1974, VYSSHIKH UCHEBN ZAVE, V7, P22
[2]   RUTHENIUM AND NICKEL PIPE DIFFUSION IN COPPER [J].
BERNARDINI, J ;
CABANE, J .
ACTA METALLURGICA, 1973, 21 (12) :1571-1578
[3]  
CARSLAW HS, 1959, CONDUCTION HEAT SOLI, P15
[4]   SURFACE ENRICHMENT OF COPPER DUE TO KEV XE SPUTTERING OF AN AL-CU MIXTURE [J].
CHU, WK ;
HOWARD, JK ;
LEVER, RF .
JOURNAL OF APPLIED PHYSICS, 1976, 47 (10) :4500-4503
[5]   AUGER STUDY OF PREFERRED SPUTTERING ON BINARY ALLOY SURFACES [J].
HO, PS ;
LEWIS, JE ;
WILDMAN, HS ;
HOWARD, JK .
SURFACE SCIENCE, 1976, 57 (01) :393-405
[6]   AUGER STUDY OF PREFERRED SPUTTERING ON AG-AU ALLOY SURFACES [J].
HO, PS ;
LEWIS, JE ;
HOWARD, JK .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1977, 14 (01) :322-325
[7]  
HO PT, UNPUBLISHED
[8]   INFLUENCE OF SPUTTERING AND TRANSPORT MECHANISMS ON TARGET ETCHING AND THIN-FILM GROWTH IN RF SYSTEMS .1. TARGET PROCESSES [J].
HOLLAND, L ;
PRIESTLAND, CR .
VACUUM, 1972, 22 (04) :133-+
[9]  
KAGANOVSKII YS, 1975, FIZ MET METALLOVED+, V39, P828
[10]   SPUTTERING OF NICKEL-CHROMIUM ALLOYS [J].
PATTERSO.WL ;
SHIRN, GA .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1967, 4 (06) :343-&
12