TRANSIENT-BEHAVIOR OF SPIN-COATED RESIST FILM THICKNESS BASED ON INVARIANCE OF VISCOUS-FLUID UNDER SIMILARITY TRANSFORMATION

被引：6

作者：

MATSUBA, I

MATSUMOTO, K

机构：

来源：

IEEE TRANSACTIONS ON ELECTRON DEVICES | 1986年 / 33卷 / 09期

关键词：

D O I：

10.1109/T-ED.1986.22656

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：1263 / 1269

页数：7

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