SHEET RESISTANCE CHANGES IN HEAT-TREATED ALUMINUM-CHROMIUM FILMS

被引：1
|
作者：
MGBENU, EN
机构：
来源：
VACUUM | 1980年 / 30卷 / 03期
关键词：
D O I：
10.1016/S0042-207X(80)80062-5
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
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页码：129 / 131
页数：3
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