MECHANISMS IN METAL-ORGANIC CHEMICAL VAPOR-DEPOSITION

被引：8
|
作者：
WILLIAMS, JO [1 ]
HOARE, RD [1 ]
KHAN, O [1 ]
PARROTT, MJ [1 ]
机构：
[1] UNIV MANCHESTER, INST SCI & TECHNOL, CTR ELECTR MAT, MANCHESTER M60 1QD, LANCS, ENGLAND
来源：
PHILOSOPHICAL TRANSACTIONS OF THE ROYAL SOCIETY A-MATHEMATICAL PHYSICAL AND ENGINEERING SCIENCES | 1990年 / 330卷 / 1610期
关键词：
D O I：
10.1098/rsta.1990.0012
中图分类号：
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号：
07 ; 0710 ; 09 ;
摘要：
引用
收藏
页码：183 / 193
页数：11
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