BEHAVIOR OF TANTALUM DURING DEPOSITION FROM THE VAPOR-PHASE

被引：0
作者：
ABRAMOV, VV
FIRSOV, VI
VOZHZHOV, VF
KOZLOV, FN
RIVKIN, MN
PETRUSEVICH, IV
机构：
来源：
RUSSIAN METALLURGY | 1978年 / 01期
关键词：
D O I：
暂无
中图分类号：
TF [冶金工业];
学科分类号：
0806 ;
摘要：
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页码：76 / 79
页数：4
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