BEHAVIOR OF TANTALUM DURING DEPOSITION FROM THE VAPOR-PHASE

被引：0

作者：

ABRAMOV, VV

FIRSOV, VI

VOZHZHOV, VF

KOZLOV, FN

RIVKIN, MN

PETRUSEVICH, IV

机构：

来源：

RUSSIAN METALLURGY | 1978年 / 01期

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D O I：

暂无

中图分类号：

TF [冶金工业];

学科分类号：

0806 ;

摘要：

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页码：76 / 79

页数：4

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