STUDIES ON NUCLEATION PROCESS IN DIAMOND CVD - AN OVERVIEW OF RECENT DEVELOPMENTS

被引：219
作者：
LIU, HM
DANDY, DS
机构：
[1] Department of Chemical Engineering, Colorado State University, Fort Collins
来源：
DIAMOND AND RELATED MATERIALS | 1995年 / 4卷 / 10期
关键词：
DIAMOND CVD; NUCLEATION MECHANISMS; RECENT DEVELOPMENTS; NUCLEATION ENHANCEMENT METHODS;
D O I：
10.1016/0925-9635(96)00297-2
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
This paper presents an updated and systematic overview of the recent developments in studies on nucleation processes in diamond CVD. The nucleation mechanisms are discussed, and the nucleation enhancement methods developed to date are summarized. The effects of surface conditions and deposition parameters on the surface nucleation are described Finally, a brief description of theoretical and modeling studies on the surface nucleation is given.
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页码：1173 / 1188
页数：16
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