HYBRID INTEGRATION OF LASER DIODE AND MONOMODE HIGH CONTRAST SLAB WAVE-GUIDE ON SILICON

被引：10

作者：

JOPPE, JL ^{[1
]}

DEKRIJGER, AJT ^{[1
]}

NOORDMAN, OFJ ^{[1
]}

机构：

[1] UNIV TWENTE,DEPT PHYS ENGN,7500 AE ENSCHEDE,NETHERLANDS

来源：

ELECTRONICS LETTERS | 1991年 / 27卷 / 02期

关键词：

LASERS; DIODES; SLAB WAVE-GUIDES; INTEGRATED OPTICS;

D O I：

10.1049/el:19910104

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The hybrid integration of an AlGaAs laser diode and a monomode high contrast optical slab waveguide on silicon is reported. The laser was placed upside down in an anisotropically etched well and mounted by thermocompression. The power coupled into the waveguide was 1 mW and a coupling efficiency of more than 5% has been achieved.

引用

页码：162 / 163

页数：2

共 8 条

[1]

Berry R.W., 1968, THIN FILM TECHNOLOGY

[2] GALLIUM-ARSENIDE LASER-ARRAY ON SILICON PACKAGE [J].

CROW, JD ;

COMERFORD, LD ;

HARPER, JS ;

BRADY, MJ ;

LAFF, RA .

APPLIED OPTICS, 1978, 17 (03) :479-485

[3] FABRICATION OF LARGE-SCALE OPTICAL-COMPONENTS IN SILICON BY REACTIVE ION ETCHING [J].

DARBYSHIRE, DA ;

PITT, CW ;

STRIDE, AA .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1987, 5 (02) :575-578

[4]

DEKRIJGER AJT, IN PRESS

[5] GLASS WAVE-GUIDES ON SILICON FOR HYBRID OPTICAL PACKAGING [J].

HENRY, CH ;

BLONDER, GE ;

KAZARINOV, RF .

JOURNAL OF LIGHTWAVE TECHNOLOGY, 1989, 7 (10) :1530-1539

[6] PARALLEL END-BUTT COUPLING FOR OPTICAL INTEGRATED-CIRCUITS [J].

HUNSPERGER, RG ;

YARIV, A ;

LEE, A .

APPLIED OPTICS, 1977, 16 (04) :1026-1032

[7] AL2O3 FILMS FOR INTEGRATED-OPTICS [J].

SMIT, MK ;

ACKET, GA ;

VANDERLAAN, CJ .

THIN SOLID FILMS, 1986, 138 (02) :171-181

[8] HYBRID INTEGRATION OF A LASER DIODE AND HIGH-SILICA MULTIMODE OPTICAL CHANNEL WAVE-GUIDE ON SILICON [J].

TERUI, H ;

YAMADA, Y ;

KAWACHI, M ;

KOBAYASHI, M .

ELECTRONICS LETTERS, 1985, 21 (15) :646-648

← 1 →