Recent Development in Applications of Optical MEMS: A Review

被引:1
|
作者
Joshi, Poorvi K. [1 ]
机构
[1] Shri Ramdeobaba Coll Engn & Management, Dept Elect Engn, Katol Rd, Nagpur 440013, Maharashtra, India
来源
HELIX | 2018年 / 8卷 / 06期
关键词
MEMS; MOEMS Devices; Sensors; Micro Mirrors;
D O I
10.29042/2018-4345-4348
中图分类号
Q81 [生物工程学(生物技术)]; Q93 [微生物学];
学科分类号
071005 ; 0836 ; 090102 ; 100705 ;
摘要
Recent development of optical MEMS emphasis on application in the field of telecommunications, various sensors and micro mirror devices are few examples. Different optical devices and systems reported and explained the major difficulties in its development as well as performance. Advantages of optical MEMS are miniaturization, integration and mass production which create lot of potential to carry out research in this area. Focus of presented review is to explore the areas for future research work. Also, to identify the key and important issues related with optical MEMS and try to develop a technology to mitigate these issues.
引用
收藏
页码:4345 / 4348
页数:4
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