SCANNING-TUNNELING-MICROSCOPY STUDY OF GAAS(001) SURFACE PREPARED BY DEOXYGENATED AND DEIONIZED WATER-TREATMENT

被引:10
作者
HIROTA, Y
FUKUDA, T
机构
[1] NTT Basic Research Laboratories, Atsugi-shi, Kanagawa, 243-01, 3-1, Morinosato Wakamiya
关键词
D O I
10.1063/1.113446
中图分类号
O59 [应用物理学];
学科分类号
摘要
This letter presents the scanning tunneling microscopy (STM) images of GaAs(001) surfaces prepared by deoxygenated and de-ionized water (DODIW) treatment. The STM images reveal that the missing-dimer rows and unit cells of the 2×4 structure and atomic-layer steps of Ga-As clearly appear after heating the samples above 500°C in an ultrahigh vacuum. These experimental results suggest the DODIW treatment can attain atomically flat GaAs(001) surface.© 1995 American Institute of Physics.
引用
收藏
页码:2837 / 2839
页数:3
相关论文
共 26 条
[11]   CLEANING EFFECTS OF RUNNING DEIONIZED WATER ON A GAAS SURFACE [J].
HIROTA, Y ;
SUGII, K ;
HOMMA, Y .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1991, 138 (03) :799-802
[12]   ETCHANT DEPENDENCE OF SURFACE RECONSTRUCTIONS OF GAAS-SURFACES PREPARED BY ULTRASONIC-RUNNING DEIONIZED WATER-TREATMENT [J].
HIROTA, Y ;
HOMMA, Y ;
SUGII, K .
APPLIED PHYSICS LETTERS, 1991, 59 (26) :3410-3412
[13]   CLEAN AND DAMAGE-FREE GAAS-SURFACES PREPARED BY ULTRASONIC RUNNING DEIONIZED WATER-TREATMENT [J].
HIROTA, Y ;
HOMMA, Y ;
SUGII, K .
APPLIED SURFACE SCIENCE, 1992, 60-1 :619-624
[14]   SCHOTTKY CHARACTERISTICS OF GAAS SURFACE CLEANED BY ULTRASONIC RUNNING DEIONIZED WATER-TREATMENT [J].
HIROTA, Y .
APPLIED PHYSICS LETTERS, 1993, 63 (14) :1936-1938
[15]   SYNCHROTRON-RADIATION PHOTOELECTRON-SPECTROSCOPY STUDY FOR GAAS (001) SURFACE PREPARED BY DEOXYGENATED AND DEIONIZED WATER-TREATMENT [J].
HIROTA, Y ;
OGINO, T ;
WATANABE, Y ;
OSHIMA, M .
APPLIED PHYSICS LETTERS, 1994, 65 (16) :2036-2038
[16]   FILM DEPOSITION TEMPERATURE-DEPENDENCE OF ELECTRON-MOBILITY FOR ACCUMULATION-MODE INP METAL-INSULATOR-SEMICONDUCTOR FIELD-EFFECT TRANSISTORS [J].
HIROTA, Y ;
OKAMURA, M ;
YAMAGUCHI, E ;
HISAKI, T .
JOURNAL OF APPLIED PHYSICS, 1989, 65 (03) :1328-1337
[17]   SURFACE-COMPOSITION AND STRUCTURE CHANGES IN GAAS COMPOUNDS DUE TO LOW-ENERGY AR+ ION-BOMBARDMENT [J].
KANG, HJ ;
MOON, YM ;
KANG, TW ;
LEEM, JY ;
LEE, JJ ;
MA, DS .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1989, 7 (06) :3251-3255
[18]   SUBSTRATE CHEMICAL ETCHING PRIOR TO MOLECULAR-BEAM EPITAXY - AN X-RAY PHOTOELECTRON-SPECTROSCOPY STUDY OF GAAS (001) SURFACES ETCHED BY THE H2SO4-H2O2-H2O SOLUTION [J].
MASSIES, J ;
CONTOUR, JP .
JOURNAL OF APPLIED PHYSICS, 1985, 58 (02) :806-810
[19]   STRUCTURE OF GAAS(001) (2X4)-C(2X8) DETERMINED BY SCANNING TUNNELING MICROSCOPY [J].
PASHLEY, MD ;
HABERERN, KW ;
FRIDAY, W ;
WOODALL, JM ;
KIRCHNER, PD .
PHYSICAL REVIEW LETTERS, 1988, 60 (21) :2176-2179
[20]   GROWTH ON (001) AND VICINAL (001) GAAS-SURFACES IN COMBINED SCANNING TUNNELING MICROSCOPE MOLECULAR-BEAM EPITAXY SYSTEM [J].
PASHLEY, MD ;
HABERERN, KW ;
GAINES, JM .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1991, 9 (02) :938-943