PREPARATION OF AMORPHOUS SI3N4-C PLATE BY CHEMICAL VAPOR-DEPOSITION

被引：42
作者：
HIRAI, T
GOTO, T
机构：
来源：
JOURNAL OF MATERIALS SCIENCE | 1981年 / 16卷 / 01期
关键词：
D O I：
10.1007/BF00552054
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
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页码：17 / 23
页数：7
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