Determination of Optical Properties in Germanium-Carbon Coatings Deposited by Plasma Enhanced Chemical Vapor Deposition

被引：1

作者：

Sousani, F. ^{[1
]}

Eshaghi, A. ^{[1
]}

Mozafarinia, R. ^{[1
]}

Jamali, H. ^{[1
]}

机构：

[1] Malek Ashtar Univ Technol, Fac Mat Sci & Engn, Esfahan, Iran

来源：

IRANIAN JOURNAL OF MATERIALS SCIENCE AND ENGINEERING | 2018年 / 15卷 / 01期

关键词：

Ge1-XCx; PECVD; Optical Coatings; Optical Properties;

D O I：

10.22068/ijmse.15.1.24

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

In this research, Germanium-carbon coatings were deposited on ZnS substrates by plasma enhanced chemical vapor deposition (PECVD) using GeH4 and CH4 precursors. Optical parameters of the Ge1-xCx coating such as refractive index, Absorption coefficient, extinction coefficient and band gap were measured by the Swanepoel method based on the transmittance spectrum. The results showed that the refractive index of the Ge1-xCx coatings at the band of 2 to 2.2 mu m decreased from 3.767 to 3.715 and the optical gap increased from 0.66 to 0.72 eV as CH4:GeH4 increases from 10:1 to 20:1.

引用

页码：24 / 30

页数：7

共 26 条

[1]

[Anonymous], 2013, J BASIC APPL SCI RES

[2] Effects of methane flow rate on the optical properties and chemical bonding of germanium carbon films deposited by reactive sputtering [J].

Che, Xing-Sen ;

Liu, Zheng-Tang ;

Li, Yang-Ping ;

Wang, Ning ;

Xu, Zuo .

VACUUM, 2013, 90 :75-79

[3] Effects of hydrogen and substrate temperature on the chemical bonding and optical properties of germanium carbon films deposited by reactive sputtering [J].

Che, Xing-Sen ;

Liu, Zheng-Tang ;

Li, Yang-Ping ;

Wang, Ning .

APPLIED SURFACE SCIENCE, 2012, 258 (17) :6212-6216

[4] Fabrication and characterization of optical and electrical properties of Al-Ti Co-doped ZnO nano-structured thin film [J].

Davoodi, Akbar ;

Tajally, Mohammad ;

Mirzaee, Omid ;

Eshaghi, Akbar .

JOURNAL OF ALLOYS AND COMPOUNDS, 2016, 657 :296-301

[5] REFRACTIVE-INDEXES OF ZINC-SULFIDE IN THE 0.405-13-MU M WAVELENGTH RANGE [J].

DEBENHAM, M .

APPLIED OPTICS, 1984, 23 (14) :2238-2239

[6] Determination of optical properties in nanostructured TiO2 thin film fabricated by electron beam physical vapor deposition [J].

Eshaghi, Akbar ;

Aghaei, Abbas Ail .

JOURNAL OF OPTICAL TECHNOLOGY, 2016, 83 (01) :26-29

[7] Optical and electrical properties of aluminum zinc oxide (AZO) nanostructured thin film deposited on polycarbonate substrate [J].

Eshaghi, Akbar ;

Hajkarimi, Mohammad .

OPTIK, 2014, 125 (19) :5746-5749

[8]

Harrise D. C., 1999, MAT INFRARED WINDOWS

[9] Effects of radio frequency power on the chemical bonding, optical and mechanical properties for radio frequency reactive sputtered germanium carbide films [J].

Hu, C. Q. ;

Xu, L. ;

Tian, H. W. ;

Jin, Z. S. ;

Lv, X. Y. ;

Zheng, W. T. .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2006, 39 (23) :5074-5079

[10] Ge1-xCx double-layer antireflection and protection coatings [J].

Hu, C. Q. ;

Zheng, W. T. ;

Li, J. J. ;

Jiang, Q. ;

Tian, H. W. ;

Lu, X. Y. ;

Liu, J. W. ;

Xu, L. ;

Wang, J. B. .

APPLIED SURFACE SCIENCE, 2006, 252 (23) :8135-8138

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