STRUCTURE AND ELECTRICAL-PROPERTIES OF TITANIUM NITRIDE FILMS

被引：61
作者：
IGASAKI, Y
MITSUHASHI, H
AZUMA, K
MUTO, T
机构：
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS | 1978年 / 17卷 / 01期
关键词：
D O I：
10.1143/JJAP.17.85
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：85 / 96
页数：12
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