CHARACTERIZATION OF THIN SILICON-OXIDE OBTAINED BY LAMP HEATING

被引：6
|
作者：
SLAOUI, A
PONPON, JP
SIFFERT, P
机构：
来源：
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1987年 / 43卷 / 04期
关键词：
D O I：
10.1007/BF00635188
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：301 / 304
页数：4
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