HIGH-Q MICROWAVE ACOUSTIC RESONATORS AND FILTERS

被引：259
|
作者：
LAKIN, KM
KLINE, GR
MCCARRON, KT
机构：
[1] TFR Technologies, Inc., Redmond, OR
来源：
IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES | 1993年 / 41卷 / 12期
关键词：
D O I：
10.1109/22.260698
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper presents recent experimental results and modeling obtained on high-Q microwave acoustic resonators and filters for use in oscillators and other frequency control applications. Overmoded resonators have exhibited an FQ greater than 1 x 10(14) Hz (e.g., Q = 68 000 at 1.6 GHz) with a strong inductive response suitable for one-port and two-port oscillator feedback circuits. Ladder filters fabricated with overmoded resonators have loaded Q's greater than 40 000 with 76 kHz bandwidth at 1.6 GHz. Aluminum nitride films were used for longitudinal transduction on Z-cut sapphire and lithium niobate substrates.
引用
收藏
页码：2139 / 2146
页数：8
相关论文
共 50 条
  • [21] Acoustic Wave Generation and Detection in Non-Piezoelectric High-Q Resonators
    Lucklum, Frieder
    Jakoby, Bernhard
    2006 IEEE ULTRASONICS SYMPOSIUM, VOLS 1-5, PROCEEDINGS, 2006, : 1132 - 1135
  • [22] Electromagnetic-Acoustic High-Q Silicon Resonators for Liquid Phase Sensing
    Lucklum, Frieder
    Jakoby, Bernhard
    IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2010, 57 (05) : 1000 - 1002
  • [23] Investigation of Microwave Loss Induced by Oxide Regrowth in High-Q Niobium Resonators
    Verjauw, J.
    Potocnik, A.
    Mongillo, M.
    Acharya, R.
    Mohiyaddin, F.
    Simion, G.
    Pacco, A.
    Ivanov, Ts
    Wan, D.
    Vanleenhove, A.
    Souriau, L.
    Jussot, J.
    Thiam, A.
    Swerts, J.
    Piao, X.
    Couet, S.
    Heyns, M.
    Govoreanu, B.
    Radu, I
    PHYSICAL REVIEW APPLIED, 2021, 16 (01)
  • [24] Molybdenum-rhenium alloy based high-Q superconducting microwave resonators
    Singh, Vibhor
    Schneider, Ben H.
    Bosman, Sal J.
    Merkx, Evert P. J.
    Steele, Gary A.
    APPLIED PHYSICS LETTERS, 2014, 105 (22)
  • [25] Entangling two high-Q microwave resonators assisted by a resonator terminated with SQUIDs
    Li, Ming
    Hua, Ming
    Zhang, Mei
    Deng, Fu-Guo
    NEW JOURNAL OF PHYSICS, 2019, 21
  • [26] High-Q channel-dropping filters using ring resonators with integrated SOAs
    Rabus, DG
    Hamacher, M
    Troppenz, U
    Heidrich, H
    IEEE PHOTONICS TECHNOLOGY LETTERS, 2002, 14 (10) : 1442 - 1444
  • [27] High-Q VHF Micromechanical Filters Using Free-free Beam Resonators
    Li, C-J
    Lin, S. -K.
    EDSSC: 2008 IEEE INTERNATIONAL CONFERENCE ON ELECTRON DEVICES AND SOLID-STATE CIRCUITS, 2008, : 343 - 346
  • [28] High-Q HF microelectromechanical filters
    Bannon, FD
    Clark, JR
    Nguyen, CTC
    IEEE JOURNAL OF SOLID-STATE CIRCUITS, 2000, 35 (04) : 512 - 526
  • [29] A high-Q hybrid acoustic mode in thin film ZnO solidly mounted resonators
    Wathen, Adam D.
    Munir, Farasat
    Hunt, William D.
    APPLIED PHYSICS LETTERS, 2009, 95 (12)
  • [30] High-Q Silicon Fin Bulk Acoustic Resonators for Signal Processing Beyond the UHF
    Ramezani, M.
    Ghatge, M.
    Tabrizian, R.
    2017 IEEE INTERNATIONAL ELECTRON DEVICES MEETING (IEDM), 2017,
12345