GROWTH OF CUBIC BORON-NITRIDE FILMS BY HOT-FILAMENT ASSISTED RF PLASMA CVD

被引：9
作者：
GUO, YP
SONG, ZH
ZHANG, YX
ZHANG, FQ
CHEN, GG
机构：
[1] Department of Physics, Lanzhou University
来源：
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1994年 / 143卷 / 01期
关键词：
D O I：
10.1002/pssa.2211430127
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
[No abstract available]
引用
收藏
页码：K13 / K17
页数：5
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