Analytical Optimization of High Performance and High Quality Factor MEMS Spiral Inductor

被引：21

作者：

Pirouznia, Parsa ^{[1
]}

Ganji, Bahram Azizollah ^{[1
]}

机构：

[1] Babol Univ Technol, Elect & Comp Engn Dept, POB 484, Babol Sar, Iran

来源：

PROGRESS IN ELECTROMAGNETICS RESEARCH M | 2014年 / 34卷

关键词：

Electric inductors - Substrates;

D O I：

10.2528/PIERM13121908

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper, design and simulation of optimized MEMS spiral inductor are presented. The effects of design parameters on characteristics of inductor have been considered. The suspended spiral inductor was designed on silicon substrate using MEMS technology to reduce the metal and substrate losses of inductor. The results show that the quality factor of the inductor is 27 at 5.23 GHz and that the maximum Q-factor is 42 at 26.56 GHz. The dimension of the inductor is 185 x 200 mu m(2), which occupies less area on chip than other works. In this work, the high quality factor inductor with small size is obtained.

引用

页码：171 / 179

页数：9

共 13 条

[1] High Q-factor CMOS-MEMS inductor [J].

Dai, Ching-Liang ;

Hong, Jin-Yu ;

Liu, Mao-Chen .

DTIP 2008: SYMPOSIUM ON DESIGN, TEST, INTEGRATION AND PACKAGING OF MEMS/MOEMS, 2008, :138-141

[2]

Dong-Ming Fang, 2010, Proceedings of the 2010 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2010), P1033, DOI 10.1109/NEMS.2010.5592582

[3]

Eun-Chul Park, 2002, ESSCIRC 2002. Proceedings of the 28th European Solid-State Circuit Conference, P147

[4] A simple wide-band on-chip inductor model for silicon-based RF ICs [J].

Gil, J ;

Shin, H .

IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, 2003, 51 (09) :2023-2028

[5]

Jeong Y, 2004, 2004 47TH MIDWEST SYMPOSIUM ON CIRCUITS AND SYSTEMS, VOL I, CONFERENCE PROCEEDINGS, P373

[6]

Lee J., 2009, IOP SCI J MICROMECH, V19

[7] Simple accurate expressions for planar spiral inductances [J].

Mohan, SS ;

Hershenson, MD ;

Boyd, SP ;

Lee, TH .

IEEE JOURNAL OF SOLID-STATE CIRCUITS, 1999, 34 (10) :1419-1424

[8] Performance trends of on-chip spiral inductors for RFICs [J].

Pan, Shu Jun ;

Li, Le-Wei ;

Yin, Wen-Yan .

Progress in Electromagnetics Research, 2004, 45 :123-151

[9] ANALYTICAL CALCULATION OF THE INDUCTANCE OF PLANAR ZIG-ZAG SPIRAL INDUCTORS [J].

Sandrolini, Leonardo ;

Reggiani, Ugo ;

Puccetti, Giovanni .

PROGRESS IN ELECTROMAGNETICS RESEARCH-PIER, 2013, 142 :207-220

[10] MODELING AND LAYOUT OPTIMIZATION TECHNIQUES FOR SILICON-BASED SYMMETRICAL SPIRAL INDUCTORS [J].

Sia, Choon Beng ;

Lim, Wei Meng ;

Ong, Beng Hwee ;

Tong, Ah Fatt ;

Yeo, Kiat Seng .

PROGRESS IN ELECTROMAGNETICS RESEARCH-PIER, 2013, 143 :1-18

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