CHARACTERIZATION OF CURRENT TRANSPORT IN MNOS STRUCTURES WITH COMPLEMENTARY TUNNELING EMITTER BIPOLAR-TRANSISTORS

被引:48
作者
SCHRODER, DK
WHITE, MH
机构
[1] FRAUNHOFER INST,INST ANGEW FESKORPERPHYS,D-7800 FREIBURG,FED REP GER
[2] WESTINGHOUSE ELECT CORP,CTR RES & DEV,BALTIMORE,MD 21203
关键词
D O I
10.1109/T-ED.1979.19516
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We have extended the work of previous investigators and studied current transport in thin- (10–20 Å) and thick-(80 Å) oxide Mnos structures with complementary tunneling emitter bipolar transistors. These devices are fabricated with ion-implanted p-n and n-p junctions to distinguish the dominant carrier species in the insulator. The dominant species in thin-oxide devices is hole transport, comprising about 99 percent of the emitter current. The hole transport is suppressed in the thick-oxide structures, where the dominant carriers are electrons. Electron impact ionization multiplication is observed in thick-oxide structures. Copyright © 1979 by The Institute of Electrical and Electronics Engineers, Inc.
引用
收藏
页码:899 / 906
页数:8
相关论文
共 13 条
[1]   REVIEW OF RECENT EXPERIMENTS PERTAINING TO HOLE TRANSPORT IN SI3N4 [J].
ARNETT, PC ;
WEINBERG, ZA .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1978, 25 (08) :1014-1018
[2]   PREPARATION AND C-V CHARACTERISTICS OF SI-SI3N4 AND SI-SIO2-SI3N4 STRUCTURES [J].
CHU, TL ;
SZEDON, JR ;
LEE, CH .
SOLID-STATE ELECTRONICS, 1967, 10 (09) :897-&
[3]   CONDUCTION STUDIES IN SILICON-NITRIDE - DARK CURRENTS AND PHOTOCURRENTS [J].
DIMARIA, DJ ;
ARNETT, PC .
IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1977, 21 (03) :227-244
[4]   AUGER COEFFICIENTS FOR HIGHLY DOPED AND HIGHLY EXCITED SILICON [J].
DZIEWIOR, J ;
SCHMID, W .
APPLIED PHYSICS LETTERS, 1977, 31 (05) :346-348
[5]   2-BAND CONDUCTION OF AMORPHOUS SILICON-NITRIDE [J].
GINOVKER, AS ;
GRITSENKO, VA ;
SINITSA, SP .
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1974, 26 (02) :489-495
[6]   SEMICONDUCTOR RADIATION DETECTORS [J].
GOULDING, FS ;
STONE, Y .
SCIENCE, 1970, 170 (3955) :280-+
[7]   AUGER DEPTH PROFILING OF MNOS STRUCTURES BY ION SPUTTERING [J].
JOHANNESSEN, JS ;
HELMS, CR ;
SPICER, WE ;
STRAUSSER, YE .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1977, 24 (05) :547-551
[8]   DEPENDENCE OF SI-SIO2 BARRIER HEIGHT ON SIO2 THICKNESS IN MOS TUNNEL STRUCTURES [J].
KASPRZAK, LA ;
LAIBOWITZ, RB ;
OHRING, M .
JOURNAL OF APPLIED PHYSICS, 1977, 48 (10) :4281-4286
[10]   CONDUCTION MECHANISM IN SILICON-NITRIDE FILMS [J].
SVENSSON, CM .
JOURNAL OF APPLIED PHYSICS, 1977, 48 (01) :329-335