ANNEALING EFFECT ON CARRIER DENSITY PROFILE IN GAAS COVERED WITH ANODIC OXIDE

被引:1
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YOKOMIZO, H
IKOMA, T
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10.1143/JJAP.17.1685
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O59 [应用物理学];
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页码:1685 / 1686
页数:2
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共 8 条
[1]  
GROVER GH, 1972, IEEE T ELECTRON DEVI, V19, P138
[2]  
HASEGAWA H, 1973, J ELECTROCHEM SOC, V120, P1385
[3]   ANODIC-OXIDATION AND MOS DEVICES OF GAAS AND GAP [J].
IKOMA, T ;
TOKUDA, H ;
YOKOMIZO, H ;
ADACHI, Y .
JAPANESE JOURNAL OF APPLIED PHYSICS, 1977, 16 :475-479
[4]   ANODIC-OXIDATION OF GAAS IN AQUEOUS H2O2 SOLUTION [J].
LOGAN, RA ;
SCHWARTZ, B ;
SUNDBURG, WJ .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1973, 120 (10) :1385-1390
[5]   AN AMORPHOUS MODIFICATION OF GALLIUM-ARSENIC (V) OXIDE [J].
REVESZ, AG ;
ZAININGER, KH .
JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1963, 46 (12) :606-606
[6]   STRUCTURE AND COMPOSITION OF NATIVE OXIDES ON GAAS [J].
SEALY, BJ ;
HEMMENT, PLF .
THIN SOLID FILMS, 1974, 22 (03) :S39-S43
[7]   MICROWAVE CAPABILITY OF 1.5 MU-M-GATE GAAS MOSFET [J].
TOKUDA, H ;
ADACHI, Y ;
IKOMA, T .
ELECTRONICS LETTERS, 1977, 13 (25) :761-763
[8]  
TOKUDA H, 1978, ELECTRONICS LETT, V14, P165