ION-IMPLANTATION DISTRIBUTIONS IN CRYSTALLINE MULTILAYER TARGETS

被引：1

作者：

HAUTALA, M

KOPONEN, I

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1987年 / 28卷 / 02期

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D O I：

10.1016/0168-583X(87)90110-8

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

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页码：237 / 241

页数：5

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