MEASUREMENT OF OXIDE THICKNESS USING A VARIABLE-ENERGY POSITRON BEAM

被引：4

作者：

LEUNG, TC ^{[1
]}

SIMPSON, PJ ^{[1
]}

ATKINSON, A ^{[1
]}

MITCHELL, IV ^{[1
]}

SCHULTZ, PJ ^{[1
]}

机构：

[1] UNIV WESTERN ONTARIO,DEPT PHYS,LONDON,ON N6A 3K7,CANADA

来源：

APPLIED SURFACE SCIENCE | 1995年 / 85卷 / 1-4期

关键词：

D O I：

10.1016/0169-4332(94)00346-7

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Thermally grown, wet silicon oxides were studied using a variable-energy positron beam. Positron data were modelled without prior knowledge of the film thicknesses, as a ''blind'' test, to evaluate our ability to interpret the positron data. Good agreement was found between film thicknesses obtained by positron annihilation, time-resolved reflectivity, and nuclear reaction analysis.

引用

页码：292 / 294

页数：3

共 14 条

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