MEASUREMENT OF OXIDE THICKNESS USING A VARIABLE-ENERGY POSITRON BEAM

被引：4

作者：

LEUNG, TC ^{[1
]}

SIMPSON, PJ ^{[1
]}

ATKINSON, A ^{[1
]}

MITCHELL, IV ^{[1
]}

SCHULTZ, PJ ^{[1
]}

机构：

[1] UNIV WESTERN ONTARIO,DEPT PHYS,LONDON,ON N6A 3K7,CANADA

来源：

APPLIED SURFACE SCIENCE | 1995年 / 85卷 / 1-4期

关键词：

D O I：

10.1016/0169-4332(94)00346-7

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Thermally grown, wet silicon oxides were studied using a variable-energy positron beam. Positron data were modelled without prior knowledge of the film thicknesses, as a ''blind'' test, to evaluate our ability to interpret the positron data. Good agreement was found between film thicknesses obtained by positron annihilation, time-resolved reflectivity, and nuclear reaction analysis.

引用

页码：292 / 294

页数：3

共 14 条

[1]

AERS GC, 1990, POSITRON BEAMS SOLID, P162

[2] SIO2/SI INTERFACE PROPERTIES USING POSITRONS [J].

ASOKAKUMAR, P ;

LYNN, KG ;

LEUNG, TC ;

NIELSEN, B ;

RUBLOFF, GW ;

WEINBERG, ZA .

PHYSICAL REVIEW B, 1991, 44 (11) :5885-5888

[3] STUDY OF HYDROGEN INTERACTION WITH SIO2/SI(100) SYSTEM USING POSITRONS [J].

ASOKAKUMAR, P ;

LYNN, KG ;

LEUNG, TC ;

NIELSEN, B ;

WU, XY .

JOURNAL OF APPLIED PHYSICS, 1991, 69 (09) :6603-6606

[4]

HALEC A, 1994, SLOW POSITRON BEAM T, P53

[5] POSITRON-ANNIHILATION AT THE SI/SIO2 INTERFACE [J].

LEUNG, TC ;

WEINBERG, ZA ;

ASOKAKUMAR, P ;

NIELSEN, B ;

RUBLOFF, GW ;

LYNN, KG .

JOURNAL OF APPLIED PHYSICS, 1992, 71 (01) :530-532

[6]

LEUNG TC, 1993, J APPL PHYS, V73, P68

[7] HYDROGEN INTERACTION WITH OXIDIZED SI(111) PROBED WITH POSITRONS [J].

LYNN, KG ;

NIELSEN, B ;

WELCH, DO .

CANADIAN JOURNAL OF PHYSICS, 1989, 67 (08) :818-820

[8] TRANSMISSION OF 1-6-KEV POSITRONS THROUGH THIN METAL-FILMS [J].

MILLS, AP ;

WILSON, RJ .

PHYSICAL REVIEW A, 1982, 26 (01) :490-500

[9] SIO2/SI INTERFACE PROBED WITH A VARIABLE-ENERGY POSITRON BEAM [J].

NIELSEN, B ;

LYNN, KG ;

CHEN, YC ;

WELCH, DO .

APPLIED PHYSICS LETTERS, 1987, 51 (13) :1022-1023

[10]

Olson G. L., 1988, Material Science Reports, V3, P1, DOI 10.1016/S0920-2307(88)80005-7

← 1 2 →