EFFECT OF LIGHT ON STABILITY OF THIN-FILMS DEPOSITED BY ION-BEAM SPUTTERING

被引：0

作者：

TEODORESCU, IA ^{[1
]}

SARBU, C ^{[1
]}

机构：

[1] INST ATOM PHYS, BUCHAREST, ROMANIA

来源：

REVUE ROUMAINE DE PHYSIQUE | 1972年 / 17卷 / 10期

关键词：

D O I：

暂无

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

页码：1133 / +

页数：1

共 50 条

[21] PROPERTIES OF SILICON AND ALUMINUM-OXIDE THIN-FILMS DEPOSITED BY DUAL ION-BEAM SPUTTERING
EMILIANI, G
SCAGLIONE, S
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (04): : 1824 - 1827
[22] ELECTRICAL-PROPERTIES AND STRUCTURES OF TANTALUM THIN-FILMS DEPOSITED BY BIAS ION-BEAM SPUTTERING
SHIOYAMA, T
OGAWA, S
YAMANAKA, K
THIN SOLID FILMS, 1979, 58 (01) : 127 - 127
[23] SIO2 THIN-FILMS DEPOSITED BY REACTIVE ION-BEAM SPUTTERING UNDER ULTRAVIOLET-LIGHT IRRADIATION
NOMURA, K
OGAWA, H
JOURNAL OF APPLIED PHYSICS, 1992, 71 (03) : 1469 - 1474
[24] SUPERCONDUCTIVITY OF TRANSITION-METAL THIN-FILMS DEPOSITED BY NOBLE-GAS ION-BEAM SPUTTERING
SCHMIDT, PH
BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1973, 18 (03): : 493 - 493
[25] SUPERCONDUCTIVITY OF TRANSITION-METAL THIN-FILMS DEPOSITED BY NOBLE-GAS ION-BEAM SPUTTERING
SCHMIDT, PH
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1973, 10 (05): : 611 - 615
[26] GROWTH OF PEROVSKITE PLZT THIN-FILMS BY DUAL ION-BEAM SPUTTERING
TOSSELL, DA
SHORROCKS, NM
OBHI, JS
WHATMORE, RW
FERROELECTRICS, 1992, 134 (1-4) : 297 - 302
[27] PREPARATION OF COCR THIN-FILMS ON POLYMER SUBSTRATES BY ION-BEAM SPUTTERING
SUZUKI, Y
TAKIGUCHI, K
YOSHITAKE, M
YOTSUYA, T
OGAWA, S
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (04): : 1870 - 1873
[28] CHARACTERIZATION OF ZR THIN-FILMS GROWN BY DUAL ION-BEAM SPUTTERING
TRIGO, JF
ELIZALDE, E
QUIROS, C
SANZ, JM
VACUUM, 1994, 45 (10-11) : 1039 - 1041
[29] DEPOSITION OF THIN-FILMS OF PZT BY A FOCUSED ION-BEAM SPUTTERING TECHNIQUE
CASTELLANO, RN
FERROELECTRICS, 1980, 28 (1-4) : 387 - 390
[30] REACTIVE ION-BEAM SPUTTERING OF THIN-FILMS OF LEAD, ZIRCONIUM AND TITANIUM
CASTELLANO, RN
THIN SOLID FILMS, 1977, 46 (02) : 213 - 221

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