STUDY OF THE MICROSTRUCTURE OF SILVER FILMS DEPOSITED BY ION-ASSISTED DEPOSITION ONTO ALUMINUM-OXIDE SUBSTRATES

被引：14
作者：
ERCK, RA
FENSKE, GR
机构：
来源：
THIN SOLID FILMS | 1989年 / 181卷
关键词：
D O I：
10.1016/0040-6090(89)90521-X
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：521 / 526
页数：6
相关论文
共 18 条
[1]   PLASMA SOURCE ION-IMPLANTATION TECHNIQUE FOR SURFACE MODIFICATION OF MATERIALS [J].
CONRAD, JR ;
RADTKE, JL ;
DODD, RA ;
WORZALA, FJ ;
TRAN, NC .
JOURNAL OF APPLIED PHYSICS, 1987, 62 (11) :4591-4596
[2]   MODIFICATION OF NIOBIUM FILM STRESS BY LOW-ENERGY ION-BOMBARDMENT DURING DEPOSITION [J].
CUOMO, JJ ;
HARPER, JME ;
GUARNIERI, CR ;
YEE, DS ;
ATTANASIO, LJ ;
ANGILELLO, J ;
WU, CT ;
HAMMOND, RH .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 20 (03) :349-354
[3]  
ERDEMIR A, 1989, 44TH STLE ANN M ATL
[4]   EFFECT OF ION-BOMBARDMENT DURING DEPOSITION ON THE X-RAY MICROSTRUCTURE OF THIN SILVER FILMS [J].
HUANG, TC ;
LIM, G ;
PARMIGIANI, F ;
KAY, E .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (06) :2161-2166
[5]   INDIUM OVERLAYERS ON CLEAN SI(100)2 X-1 - SURFACE-STRUCTURE, NUCLEATION, AND GROWTH [J].
KNALL, J ;
SUNDGREN, JE ;
HANSSON, GV ;
GREENE, JE .
SURFACE SCIENCE, 1986, 166 (2-3) :512-538
[6]   SUMMARY ABSTRACT - CHARACTERIZATION OF ION-BEAM DEPOSITED DIAMONDLIKE CARBON COATING ON SEMICONDUCTORS [J].
KOEPPE, PV ;
KAPOOR, VJ ;
MIRTICH, MJ ;
BANKS, BA ;
GULINO, DA .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (06) :2327-2328
[7]   FRICTION AND WEAR OF NB METAL-DEPOSITED SIC AND THE EFFECTS OF HIGH-ENERGY ION IRRADIATION [J].
KOHZAKI, M ;
NODA, S ;
DOI, H ;
KAMIGAITO, O .
MATERIALS LETTERS, 1987, 6 (03) :64-66
[8]   FRICTION-REDUCING COATINGS BY DUAL FAST ATOM BEAM TECHNIQUE [J].
KUWANO, H ;
NAGAI, K .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1986, 4 (06) :2993-2996
[9]   EFFECT OF ION-BOMBARDMENT ON INITIAL-STAGES OF THIN-FILM GROWTH [J].
MARINOV, M .
THIN SOLID FILMS, 1977, 46 (03) :267-274
[10]   ION-ASSISTED THIN-FILM DEPOSITION AND APPLICATIONS [J].
MARTIN, PJ .
VACUUM, 1986, 36 (10) :585-590
12