PREPARATION OF YBA2CU3OX THIN-FILMS BY LAYER-BY-LAYER METALORGANIC CHEMICAL VAPOR-DEPOSITION

We have investigated the preparation of YBa2Cu3Ox thin films on MgO (100) substrates by sequential metalorganic source supply with the metal configuration along the c-axis at low substrate temperature (560-degrees-C). Oxygen is also sequentially supplied to the substrate. Four types of films are prepared by various sequential supply patterns of metalorganic precursors and oxygen. Our results show that layer-by-layer oxidation is important for c-axis orientation of the films and that Ba is more suitable than Cu as the first layer with respect to preventing the growth of CuYO2.