SINGLE-STEP OPTICAL LIFT-OFF PROCESS

被引：170

作者：

HATZAKIS, M

CANAVELLO, BJ

SHAW, JM

机构：

来源：

IBM JOURNAL OF RESEARCH AND DEVELOPMENT | 1980年 / 24卷 / 04期

关键词：

D O I：

10.1147/rd.244.0452

中图分类号：

TP3 [计算技术、计算机技术];

学科分类号：

0812 ;

摘要：

引用

页码：452 / 460

页数：9

共 16 条

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