HETEROINTERFACE STABILITY IN GAAS-ON-SI GROWN BY METALORGANIC CHEMICAL VAPOR-DEPOSITION

被引:24
作者
PEARTON, SJ [1 ]
MALM, DL [1 ]
HEIMBROOK, LA [1 ]
KOVALCHICK, J [1 ]
ABERNATHY, CR [1 ]
CARUSO, R [1 ]
VERNON, SM [1 ]
HAVEN, VE [1 ]
机构
[1] SPIRE CORP,BEDFORD,MA 01730
关键词
D O I
10.1063/1.98333
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:682 / 684
页数:3
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