OPTIMIZING PRECISION OF ROTATING-ANALYZER ELLIPSOMETERS

被引：123

作者：

ASPNES, DE ^{[1
]}

机构：

[1] BELL TEL LABS INC,MURRAY HILL,NJ 07974

来源：

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA | 1974年 / 64卷 / 05期

关键词：

ELLIPSOMETERS;

D O I：

10.1364/JOSA.64.000639

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

页码：639 / 646

页数：8

共 30 条

[1]

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ASPNES, DE .

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ASPNES, DE .

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ASPNES, DE .

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[5] GEOMETRICALLY EXACT ELLIPSOMETER ALIGNMENT [J].

ASPNES, DE ;

STUDNA, AA .

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[6]

ASPNES DE, UNPUBLISHED DATA

[7]

Azzam R. M. A., 1972, Optics Communications, V5, P5, DOI 10.1016/0030-4018(72)90124-1

[8] CHOICE OF COMPENSATOR AZIMUTH AND POSITION IN ELLIPSOMETRY [J].

AZZAM, RMA ;

BASHARA, NM .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1972, 62 (05) :700-&

[9] UNIFIED ANALYSIS OF ELLIPSOMETRY ERRORS DUE TO IMPERFECT COMPONENTS, CELL-WINDOW BIREFRINGENCE, AND INCORRECT AZIMUTH ANGLES [J].

AZZAM, RMA ;

BASHARA, NM .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1971, 61 (05) :600-&

[10] SPECIMEN COHERENT SCATTERING AND COMPENSATOR DEFECTS IN ELLIPSOMETRY [J].

AZZAM, RMA ;

BASHARA, NM .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1971, 61 (09) :1236-&

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